Marco Haverlag
Original record- Institution
- Technische Universiteit Eindhoven
- Year
- 1991
- Country
- Netherlands
- MGP identifier
- 317575
Dissertation: Plasma chemistry of fluorocarbon RF discharges used for dry etching
Advisors 2
- Frits (Frederik Johan) de HoogTechnische Universiteit Eindhoven · 1969
- Gerardus Maria Wilhelmus KroesenTechnische Universiteit Eindhoven · 1988
Students 0
No students recorded in this snapshot.