Michiel Alexander Blauw
Original record- Institution
- Technische Universiteit Delft
- Year
- 2004
- Country
- Netherlands
- MGP identifier
- 309040
Dissertation: Deep anisotropic dry etching of silicon microstructures by high-density plasmas
Advisors 2
- Sijbrand RadelaarTechnische Universiteit Delft · 1967
- Emile Willibrordus Jacobus Marie van der DriftTechnische Universiteit Delft · 1985
Students 0
No students recorded in this snapshot.