Dirk de Roover
Original record- Institution
- Technische Universiteit Delft
- Year
- 1997
- Country
- Netherlands
- MGP identifier
- 269657
Dissertation: Motion control of a wafer stage : a design approach for speeding up IC production
Mathematics Subject Classification: 93—Systems theory; control
Advisor 1
- Okko BosgraTechnische Universiteit Delft · 1968
Students 0
No students recorded in this snapshot.