Hongbo Zhang
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 2012
- Country
- United States
- MGP identifier
- 164695
Dissertation: Design-Technology Co-Optimization in Next Generation Lithography
Advisor 1
- Martin Ding Fat WongUniversity of Illinois at Urbana-Champaign · 1987
Students 0
No students recorded in this snapshot.