Ian Hu
Original record- Institution
- National Cheng Kung University
- Year
- 2011
- Country
- Taiwan
- MGP identifier
- 156871
Dissertation: Synergetic Effects of Multi-Zone Wafer-Back Pressure and Retaining-Ring Parameters on Contact Stress Uniformity in Chemical Mechanical Planarization and a Model Problem of Grooved Surface Lubrication
Mathematics Subject Classification: 76—Fluid mechanics
Advisors 2
- Kuo-Shen ChenInstitution not recorded
- Tian-Shiang YangMassachusetts Institute of Technology · 1996
Students 0
No students recorded in this snapshot.