Yao-Chen Wang
Original record- Institution
- National Cheng Kung University
- Year
- 2008
- Country
- Taiwan
- MGP identifier
- 126330
Dissertation: Numerical Simulation and Process Parameter Study for Chemical Mechanical Planarization
Mathematics Subject Classification: 76—Fluid mechanics
Advisor 1
- Tian-Shiang YangMassachusetts Institute of Technology · 1996
Students 0
No students recorded in this snapshot.