Junqing Lu
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 2001
- Country
- United States
- MGP identifier
- 122473
Dissertation: Modeling Plasma Equipment and Feature Profile in Ionized Metal Physical Vapor Deposition
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.