Geun Young Yeom
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 1989
- Country
- United States
- MGP identifier
- 122468
Dissertation: Characterization of RF Cylindrical Magnetron Plasmas and Reactive Ion Etching of Silicon/Silicon Dioxide: Its Effect on Radiation Damage and Contamination
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.