Yilin Weng
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 1991
- Country
- United States
- MGP identifier
- 122467
Dissertation: Self-Consistent Monte Carlo Simulations of Plasma Processing Reactors
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.