Helen H Hwang
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 1997
- Country
- United States
- MGP identifier
- 122461
Dissertation: Particles in Plasma Processing Reactors: Modeling Nucleation, Transport, and Interparticle Effects to Reduce Wafer Contamination
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.