Frederick Yi-Kai Huang
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 1997
- Country
- United States
- MGP identifier
- 122460
Dissertation: Transport and Agglomeration of Dust Contaminant Particles in Reactive Ion Etch Reactors
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.