Robert John Hoekstra
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 1998
- Country
- United States
- MGP identifier
- 122459
Dissertation: A Model of Energy and Angular Distributions of Fluxes to the Substrate and Resulting Surface Topology for Plasma Etching Systems
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.