Michael Joseph Hartig
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 1993
- Country
- United States
- MGP identifier
- 122458
Dissertation: A Hybrid Hydrodynamic-Monte Carlo Simulation of the Transport of Neutral Radicals in Low-Pressure Remote Plasma Sources
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.