Seung Jin Choi
Original record- Institution
- University of Illinois at Urbana-Champaign
- Year
- 1993
- Country
- United States
- MGP identifier
- 122456
Dissertation: Modeling of Generation and Transport of Particles in Low Pressure Glow Discharges and Contamination of Wafers
Advisor 1
- Mark Jay KushnerCalifornia Institute of Technology · 1979
Students 0
No students recorded in this snapshot.